6

Polymers in electron beam and X-Ray lithography

Year:
1983
Language:
english
File:
PDF, 3.08 MB
english, 1983
10

10.1295/kobunshi.33.560

Year:
1984
File:
PDF, 2.47 MB
1984
11

The LIGA Process.

Year:
1994
File:
PDF, 3.11 MB
1994
15

The liga process. Micromachining techniques.

Year:
1994
Language:
english
File:
PDF, 785 KB
english, 1994